References

  

Data Sheets

BaTiO3 Target

Scope:

This product data sheet characterizes Barium Titanate (BaTiO3 99.9%) targets produced by SCI Engineered Materials (SCI). The following information is not a specification; however, it may prove useful to the customer in developing a formal product specification.

General Description:

SCI offers phase pure Barium Titanate (BaTiO3) targets manufactured either by a CIP/Sinter process or by hot pressing. Targets smaller than 5 inches (diameter) are generally fabricated using CIP/Sinter process, whereas larger targets (>5 inches) are hot pressed. Smaller hot pressed targets are also available upon request.

In a typical CIP/Sinter process, phase pure powders are pressed uniaxially to a desired shape and then pressed isostatically (CIP). The green part is then sintered in a controlled atmosphere to achieve the desired density and grain size. Typical grain size of a CIP/Sinter target is about 2- 5 µm.

Larger BaTiO3 targets are sintered under pressure by hot pressing. SCI has the capability of hot pressing targets up to 12 inches in diameter. Typical grain size of a hot pressed BaTiO3 target is about 1- 2 µm.

The CIP/sintered or the hot pressed part is machined and generally bonded to a Copper plate or into a cup to produce a thermally stable, mechanically robust target assembly suitable for sputtering, laser ablation, or ion assisted deposition.

Typical X-ray diffraction pattern and the microstructure of CIP/Sintered and hot Pressed targets are shown below.

Handling Instructions:

The targets should always be stored under vacuum. The targets are shipped in vacuum sealed polythene bags for your convenience. The targets may require periodic cleaning between depositions. It should never be touched with bare hands. For other information, please refer to MSDS sheet.