Data Sheets
Indium Tin Oxide (ITO)
ITO (In2O3/SnO2), 99.99% pure, Sputtering Targets
Scope:
This product data sheet characterizes ITO sputtering targets sold by
SCI Engineered Materials (SCI). The following information is not a specification;
however, it may prove useful to the customer in developing a formal product
specification.
General Description:
SCI’s standard composition for ITO sputtering targets is In2O3/SnO2
90/10wt%. Other compositions are available upon request. Typically, the
targets are fabricated as multiple piece metallically bonded assemblies.
Bonding:
ITO sputtering targets produced by SCI can be bonded to customer supplied
backing plates. SCI also supplies backing plates upon request. SCI provides
several bonding processes to ensure adequate mechanical strength, thermal
transfer, and superior electrical conductivity.
Cleaning & Packaging:
A high purity solvent is used to clean and rinse the targets. The entire
target assembly is sealed in vacuum poly bags and securely packed into
SCI or customer supplied shipping containers.
Documentation:
A Certificate of Analysis and Material Safety Data Sheet are included
with each target.
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