Data Sheets
LaSrCoO Target
Scope:
This product data sheet characterizes Lanthanum Strontium Cobalt Oxide
(La-Sr-Co-O 99.9%) targets produced by SCI Engineered Materials (SCI).
The following information is not a specification; however, it may prove
useful to the customer in developing a formal product specification.
General Description:
SCI offers Lanthanum Strontium Cobalt Oxide (La-Sr-Co-O) targets manufactured
by a CIP/Sinter process. In a typical CIP/Sinter process, phase pure powders
are pressed uniaxially to a desired shape and then pressed isostatically
(CIP). The green part is then sintered in a controlled atmosphere to achieve
the desired density and grain size. The sintered part is machined and
generally bonded to a Copper cup/plate to produce sputtering targets.
Targets for laser ablation are not bonded. The targets produced by this
process are phase pure with grain size of about 2-8 mm. Targets with standard
composition of La0.5Sr0.5CoOx are generally offered. However, targets
with customized stochiometry and dopings are also available on request.
For quality control purposes, a coupon target is generally fabricated.
The coupon target is characterized for phase purity by standard X-ray
diffraction technique.
Photograph of a sputtering target assembly, x-ray diffraction
pattern and the microstructure of a typical La0.5Sr0.5CoOy target are
shown below.
Typical Impurities (starting powder, in ppm):
Handling Instructions:
The targets should always be stored under vacuum. The targets are shipped
in vacuum sealed polythene bags for your convenience. The targets may
require periodic cleaning between depositions. It should never be touched
with bare hands. For other information, please refer to MSDS sheet.
|
